材料期刊网

Structure and Mechanical Performance of Nitrogen Doped Diamond-like Carbon Films

Huayu ZHANG , Liangxue LIU , Yulei WANG

材料科学技术（英文）

Nitrogen doped diamond-like carbon (DLC:N) films were prepared by electron cyclotron resonance chemical vapor deposition (ECR-CVD) on polycrystalline Si chips. Film thickness is about 50 nm. Auger electron spectroscopy (AES) was used to evaluate nitrogen content, and increasing N2 flow improved N co...

关键词: Nitrogen doped diamond-like carbon films , doped , diamond-like , carbon , films