Jian CHEN
,
Wenduo WEI
,
Mingchuan YANG
,
Xiukui SUN
,
Wenxiu CHEN and Zhuangqi HU (State Key Lab. of RSA
,
Institute of Metal Research
,
Chinese Academy Sciences
,
Shenyang
,
110015
,
China)
材料科学技术（英文）
The composition distribution in Fe50Pd50 alloy ultrafine particles prepared by inert gas condensation method was investigated in details by means of X-ray diffraction technique through deconvolution of the X-ray diffraction data. The microscopic composition distribution in the alloy UFP was identified, which is caused by nonuniformity of the melt, fractional distillation during the evaporation process and statistical fluctuation during nucleation and coalescence of the alloy particles. The composition distribution affects the properties of the alloy UFP
关键词:
Chenguang GONG+
,
Fuchu SHEN
,
Biguang YE
,
Jian CHEN
,
Zhenjiang University
,
Hangzhou
,
310027
,
China
材料科学技术（英文）
This article discusses the silicon lattice damage induced during H-plasma in-situ cleaning and finds that the substrate temperature, plasma power, processing time, all affect the extent of the distortion of the surface and its curability.
关键词:
H-plasma cleaning
,
null
,
null
,
null
