材料期刊网

Effect of Substrate Bias on Microstructure and Properties of Tetrahedral Amorphous Carbon Films

Jiaqi ZHU , Jiecai HAN , Songhe MENG , Qiang LI , Manlin TAN

材料科学技术（英文）

The microstructure and properties of tetrahedral amorphous carbon (ta-C) films deposited by the filtered cathodic vacuum arc technology has been investigated by visible Raman spectroscopy, AFM and Nano-indentor. The Raman spectra have been fitted with a single skewed Lorentzian lineshape described b...

关键词: Tetrahedral amorphous carbon , null , null