Jun DU
,
Ping ZHANG
材料科学技术(英文)
Ti-containing carbon films were deposited by using magnetron sputtering deposition. The composition and microstructure of the carbon films were characterized in detail by combining the techniques of Rutherford backscattering spectrometry (RBS), X-ray photoelectron spectroscopy (XPS), X-ray diffracti...
关键词:
magnetic sputter deposition
,
磁控溅射
,
碳膜