QI Zhenzhong
,
YAO Weiguo
,
WANG Yuqi
,
LIU Ling
,
JIA Junhui Institute of Solid State Physics
,
Academia Sinica
,
Hefei
,
China.
材料科学技术（英文）
Introducing N_2 during sputtering and pre-oxidation of substrate were investigated to improve the adhesion of sputtered TiC coating to steel substrate. The results show that yeactive gas N_2 increases the adhesion of TiC coating to steel because of a graded interface existing between coating and substrate. The interaction of discharge plasma with the surface of substrate was discussed. Pre-oxidation of substrate is effective for improving the adhesion due to the fomation of FeTi0_3 which appeared as an inteylayer between coating and pre-oxidized substrate.
关键词:
Sputtering
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