QI Zhenzhong
,
YAO Weiguo
,
WANG Yuqi
,
LIU Ling
,
JIA Junhui Institute of Solid State Physics
,
Academia Sinica
,
Hefei
,
China.
材料科学技术(英文)
Introducing N_2 during sputtering and pre-oxidation of substrate were investigated to improve the adhesion of sputtered TiC coating to steel substrate. The results show that yeactive gas N_2 increases the adhesion of TiC coating to steel because of a graded interface existing between coating and sub...
关键词:
Sputtering
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