Y.F.Hu
金属学报(英文版)
Polycrystalline silicon thin films were prepared by RTCVD (rapid thermal chemical vapor deposition) method on several substrates such as SSP (silicon sheet from powder) ribbon, poly-Si wafer and mono-Si wafer, lntra-granular defects such as stacking faults, twins and microstructure defects were investigated on thin films by scan electron microscopy (SEM) technique.
关键词:
poly-Si thin film
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null
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Y.F.Hu
,
H.Shen
,
Z.Y.Liu
,
L.S.Wen
金属学报(英文版)
Poly-crystalline sihcon thin film has big potential of reducing the cost of solar cells.In this paper the preparation of thin film is introduced, and then the morphology of poly-crystalhne thin film is discussed. On the film we developed poly-crystaUine silicon thin film solar cells with efficiency up to 6.05 165194876thout anti-reflection coating.
关键词:
poly-crystalline silicon thin film
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null
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null
