Yang Ju
,
Yasushi Ohno
,
Hitoshi Soyama
,
Masumi Saka
材料科学技术（英文）
A method for electrical characterization of doped silicon in a contactless fashion using high-frequency electromagnetic waves was presented. A focusing sensor was used to focus a 110 GHz microwave on the surface of a silicon wafer. The amplitude and phase of the reflection coefficient of the microwa...
关键词:
Conductivity
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