材料期刊网

KINETICS OF PREPARATION OF ULTRAFINE TiN POWDER BY HIGH FREQUENCY PLASMA

ZHU Lianxi ZOU Siwei Chengdu University of Science and Technology , Chengdu , China ZHU Lianxi Dept.fo Environmental Science and Engineering , Chengdu University of Science and Technology , Chengdu 610065 , China

金属学报(英文版)

The reaction kinetie model for the synthesis of ultrafine TiN powder from vapour phase sys- tem TiCl_4-NH_3-H_2-N_2 in the high frequency plasma reactor was proposed as follows: 1/V((dn_(TiCl_4))/dt)=0.852e~(-63.2·RT)P_(TiCl_4) The majority of factors influenced upon the reaction rate were analysed,so as to provide the theoretical basis for improving quality of TiN powder and for optimizing the design of plasma reactor.

关键词: TiN , null , null