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Evaluation of Young's Modulus and Residual Stress of NiFe Film by Microbridge Testing

Zhimin ZHOU , Yong ZHOU , Mingjun WANG , Chunsheng YANG , Ji'an CHEN , Wen DING , Xiaoyu GAO , Taihua ZHANG

Microbridge testing was used to measure the Young's modulus and residual stress of metallic films. Samples of freestanding NiFe film microbridge were fabricated by microelectromechanical systems. Special ceramic shaft structure was designed to solve the problem of getting the load-deflection curve o...

关键词: Mechanical properties , 金属薄膜 , 纳米压痕

Influence of Bias on the Properties of Carbon Nitride Films Prepared by Vacuum Cathodic Arc Method

Zhimin ZHOU , Lifang XIA , Mingren SUN

材料科学技术（英文）

Carbon nitride films have been synthesized in a wide range of biases from 0 to -900 V by vacuum cathodic arc method. The N content was about 12.0~22.0 at. pct. Upon increasing the biases from 0 to -100 V, the N content increased from 15.0 to 22.0 at. pct which could be attributed to the knot-on effe...

关键词: Carbon nitride , null , null , null

材料期刊网

Evaluation of Young's Modulus and Residual Stress of NiFe Film by Microbridge Testing

Influence of Bias on the Properties of Carbon Nitride Films Prepared by Vacuum Cathodic Arc Method

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