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Ti-N扩散障碍膜的组织结构及高温热稳定性

王家军 , 孙榆芳 , 叶锐曾

中国腐蚀与防护学报

研究了多弧离子镀Ti-N扩散障碍膜的表面形貌、组织结构及高温热稳定性.发现Ti-N膜表面存在大量颗粒物;颗粒物对Ti-N膜外磁控溅射涂覆的MCrAIX包覆型涂层的组织形态及性能有较大影响.X射线分析表明:Ti-N镀膜由δ-TiN、ε-TiDN、α-Ti等多相组成;δ-TiN呈明显{111}择优取向,但经扩散退火处理后,择优取向消失.1000℃热时效试验结果表明Ti-N膜的高温热稳定性良好,与基体及相邻MCrAIX镀层间不发生显著互扩散,因而可作为扩散障碍层用于抑止或减缓合金元素在GH220基体及MCrAlX涂层间的互扩散.

关键词: Ti-N镀膜 , Preferred orientation , High temperature stability

Preparation of Oriented Barium Titanate Thin Films by Combination of Electrophoretic Deposition with Hydrothermal Treatment

Lihong Xue Youwei Yan

材料科学技术(英文)

Highly oriented barium titanate (BaTiO3) thin films on Pt substrate were fabricated by combination of electrophoretic deposition with hydrothermal treatment. The structure and morphology of thin films were characterized by X-ray diffraction and field-emission scanning electron microscopy. It is found that the titania precursor film, Ba(OH)2  oncentration and hydrothermal temperature play crucial roles in the film morphology and orientation. The BaTiO3 thin films with highly (110) preferred orientation can be formed on  polycrystalline Pt substrate by appropriate adjustment of the reaction conditions. The orientation parameter f of highly oriented BaTiO3 films was up to 1.00. The films exhibited a smooth and crack-free surface and remained in the layered structure. In situ topotactic transformation and dissolution-crystallization mechanisms were proposed to explain the morphology and orientation of BaTiO3 films during hydrothermal treatment.

关键词: Barium titanate , Preferred orientation , Electrophoretic deposition , Hydrothermal treatment

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