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低温热处理CoN/CN软X射线多层膜的界面互扩散研究

白海力 , 姜恩永

金属学报

在473—523K的低温退火条件下，通过对CoN／CN软X射线多层膜一级调制峰强度增强的定量观测，研究了CoN／CN软X射线多层膜的界面互扩散行为，并测得低至10-25m2s-1的有效扩散系数通过和Co/C多层膜的结果相比较，发现N掺杂使CoN／CN软X射线多层膜的界面互扩散行为明显不同于Co／C多层膜，并具有如下特点：（1）有效扩散系数和宏观扩散系数较小；（2）扩散激活能较大；（3）临界波长相等Co—N，C—N之间存在的强化学键以及N原子的填隙，减小了结构弛豫和界面扩散这表明通过N掺杂有希望改善Co／C软X射线多层膜的结构热稳定性.

关键词: 软X射线多层膜 , multilayer , interdiffusivity , doping

STRUCTURE AND PROPERTIES OF Cu-Co MULTILAYER FILMS PRODUCED BY ELECTRODEPOSITION

J. Y. Xue , J.X. Wu and D.J. Yang (Department of Surface Science and Corrosion Engineering , University of Science and Technology Beijing , Beijing 100083 , China)

金属学报(英文版)

Multilayer Cu-Co film has been produced from a single bath by the method of pulse electrodeposition. Its structure and some magnetic properties were analysed by TEM,AES, XRD and VSM. The results indicated that the film was layed structure, consisted of alternating pure copper and copper-cobalt alloy layers. The results have shown the possibility of producing multilayer films with perpendicular magnetic anisotropy byelectrodeposition.

关键词: electrodeposition , null , null

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