JIANG Hai TAO Kun LI Hengde Tsinghua University
,
Beijing
,
China lecturer
,
Department of Materials Science and Engineering
,
Tsinghua University
,
Beijing 100084
,
China
金属学报(英文版)
BN films,synthesized by ion beam assisted deposition,were analysed by RBS,AES, IR spectra and TEM.Formatiom of c-BN phase was shown not only by IR spectra at absorption peak of 1100 cm~(-1),but also by electron diffraction pattern.The results of AES demonstrate an effect of N~+ implantation near the film surface.The deposited films consist of three layers,i.e.,ion implantation layer,film layer and mixed intermediatelayer, according to the difference of concentration.The micro-Knoop hardness of the film is 25—35 GPa.
关键词:
ion beam assisted deposition
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