Liping SHI
,
Yao LI
,
Xiaodong HE
材料科学技术（英文）
The preparation technology of microlayer composite material by the electron beam physical vapor deposition (EBPVD) technique was briefly introduced. Taking the advantage of the large-scale commercial software of finite element analysis, a reasonable physical model was built up during the deposition processing and the distribution of residual stress was analyzed between substrate and deposition layer or among deposition layers. The results show that: with the increasing substrate preheating temperature, the interlaminar shear stress increases but the axial residual stress decreases. The probability of curling up after de-bonding tends to enhance as the thickness of deposition film increases.
关键词:
Microlayer composite material
,
null
,
null
,
null
朱华新
,
王彤彤
,
高劲松
,
刘桂林
,
李帅
人工晶体学报
以K9为基底设计了一种超宽截止边带滤光片,即:截止带波长0.5～0.85 μm、高透波长0.9～1.3 μm,膜层总数为57层,总厚度达6.026 μm,工艺实现采用了电子束蒸发物理气相沉积的方法,薄膜材料仅含有TiO2和SiO2,并分别作为高低折射率材料.利用分光光度计对该膜系样品的透过率进行测量,测试结果表明截止区(0.5～0.85 μm)的截止深度达5×10-3以下,截止带宽达350 nm,0.9～1.3 μm通带内的平均透过率也达到83.14％,除通带短波边缘外,实际样品的光学特性与设计结果基本相符,具有宽截止带深截止度、高通带透过率的特性.环境测试表明:薄膜具有良好的稳定性和牢固度.该边带滤光片可以应用于可靠性要求较高的环境中.
关键词:
光学薄膜
,
电子束蒸发物理气相沉积
,
滤光片
L.P. Shi
,
X.D. He
,
Y. Li
金属学报(英文版)
This paper briefly introduces the characteristics of electron beam physical vapor deposition (EBPVD) technique and the whole process of preparing micro-layer composite
laminate. And several major influencing factors are presented and discussed. It was
found that residual gas pressure should be low enough to guarantee the unobstructed
transportation of vapor steam and electron beam; the evaporation method and evaporation speed are up to the di®erent vapor pressure deficit of compositions of raw materials; and the substrate temperature could have great influence on the microstructure
of the micro-layer laminates.
关键词:
micro-layer composite material
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null
,
null
李帅
,
孙亚军
,
刘桂林
,
朱华新
,
郭颖
,
李果华
人工晶体学报
以K9为基底设计了一种覆盖部分可见及近红外双波段的增透膜,即:增透波长包括0.55 ～0.78μm和1.0～1.3 μm两个波段.工艺实现采用了电子束蒸发物理气相沉积的方法,薄膜材料仅含有TiO2和SiO2,并分别作为高低折射率材料.利用岛津分光光度计对双面镀制该膜系样品的透过率进行测量,测试结果表明0.55 ～0.78μm波段平均透过率为98.01％,1.0～1.3μm波段平均透过率达到97.04％.通过SEM的膜层截面证实实际膜层厚度相对于设计值来说偏厚,致使透射率光谱曲线略往长波方向漂移,但所需波段内平均透过率仍可满足所需光学特性.环境测试表明:薄膜具有良好的稳定性和牢固度.该增透膜可以应用于可靠性要求较高的环境中.
关键词:
光学薄膜
,
电子束蒸发物理气相沉积
,
透过率
