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陈尔东 , 王聪
材料科学与工程学报
用直流磁控溅射技术在玻璃基底上沉积TiNxOy薄膜.应用XRD与SEM表征了TiNxOy,薄膜的晶化程度及表面形貌.在室温下300～900 nm的波长范围内测量了薄膜的透射光谱,并根据"包络法"理论,计算了薄膜的光学常数.结果表明,随着入射波长的增加,薄膜的折射率n先减小后再增加;消光系数k单调增加...
关键词: 直流磁控溅射 , TiNxOy , 薄膜 , 光学特性 , 包络法
D.Chen
金属学报(英文版)
Spectral selective absorbent film is a crucial factor for the solar heating device. There are many kinds of spectral selective absorbing film made by different ways. TiNxOy thin film with excellent spectral selecting absobent property were successfully prepared by DC magnetron sputtering with Ar as ...
关键词: spectrum selecting absorbent film , null , null
