G.Q.Lin
,
Z.F.Ding
,
D.Qi
金属学报(英文版)
Arc deposition, a widely used surface coating technique, has disadvantages such aslarge droplet size and high deposition temperature. Recent trend in its renovation isthe introduction of pulsed bias at the substrate. The present paper attempts to describethe deposition process of TiN films using thi...
关键词:
arc deposition
,
null
,
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