REN Jianshi ZHAO Huilin ZHANG Gongshu Institute of Metal Research
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Academia Sinica.Shenyang
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China ZHANG Gongshu
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Senior Engineer
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Institute of Metal Research
,
Academia Sinica
,
Shenyang 110015
,
China
金属学报(英文版)
Glow discharge cathodic sputtering of alloys containing second phase precipitates or injected oxide particles has been observed with energy dispersive X-ray spectrometer and scanning electron microprobe.It was shown that the formation of cones during the sputtering in these alloys is due to masking of the matrix by glow sputtering second phase precipitates or oxide particles.At steady state,the density of cottes were found to be a function of the densities pre- cipitates or oxide particles in bulk alloy.In addition to the changes of local sputtering rate,the electrostatic effect may play a role on the formation fo cones.
关键词:
glow discharge
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