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Microstructural characteristics of epitaxial BaSrNb0.3Ti0.7O3 film

Li′na CHENG

材料科学技术(英文)

Microstructural characteristics in the BaSrNb0:3Ti0:7O3 thin film, grown on SrTiO3 substrate by computercontrolled laser molecular beam epitaxy, were characterized by means of transmission electron microscopy (TEM). It is found that the film is single-crystallized and epitaxially grown on the SrTiO3...

关键词: BaSrNb0.3Ti0.7O3 thin film , thin , film , epitaxial , gro

H-plasma In-situ Cleaning and Lattice Damage Elimination

Chenguang GONG+ , Fuchu SHEN , Biguang YE , Jian CHEN , Zhenjiang University , Hangzhou , 310027 , China

材料科学技术(英文)

This article discusses the silicon lattice damage induced during H-plasma in-situ cleaning and finds that the substrate temperature, plasma power, processing time, all affect the extent of the distortion of the surface and its curability....

关键词: H-plasma cleaning , null , null , null

高温超导YBa2Cu3O7-δ-Y2O3多层薄膜的制备及性能表征

刘宇 , 陈星斌 , 陈金清 , 姚文俐 , 刘鲁峰 , 杜国平

低温物理学报

采用脉冲激光沉积技术(PLD)在LaAlO3(100)单晶衬底上外延生长YBa2Cu3O7-δ-Y2O3多层薄膜,用X射线衍射技术(XRD)分析薄膜的物相结构和外延特性,通过原子力显微镜(AFM)观察薄膜的表面形貌.本文主要研究了最佳工艺参数下交替生长多层YBCO-Y2O3膜的超导性能.结果表明,W...

关键词: 高温超导薄膜 , PLD , Y2O3 , 外延

衬底材料对Ba0.6Sr0.4TiO3薄膜介电性能的影响

娄建忠 , 李振娜 , 方晓燕 , 代秀红 , 宋安英 , 宋建民 , 刘保亭

人工晶体学报

采用脉冲激光沉积系统分别在LaAlO3(001)和MgO(001)衬底上沉积了Ba06Sr04TiO3(BST)薄膜,以Pt做电极分别构架了Pt/BST/MgO和Pt/BST/LaAlO3叉指电容器.利用X射线衍射仪、原子力显微镜和Aglient E4980LCR表分别对两种薄膜的结构、表面形貌和介...

关键词: 脉冲激光沉积 , Ba0.6Sr0.4TiO3薄膜 , 外延 , 介电性能