常正凯
,
肖金泉
,
陈育秋
,
刘山川
,
宫骏
,
孙超
金属学报
doi:10.3724/SP.J.1037.2012.00056
研究了电弧离子镀磁性靶材使用过程中发生“跑弧”并导致靶材无法稳定刻蚀的问题. 利用有限元方法(FEM)对外加磁场下非磁性靶材系统和磁性靶材系统中的磁场分布进行了模拟. 研究了外磁场对电弧斑点运动的影响机理, 并结合电弧斑点放电的物理机制, 探讨了磁性靶材与低饱和蒸气压金属靶壳、绝缘陶瓷靶壳或软磁性金...
关键词:
电弧离子镀
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magnetic material
,
finite element method
,
magnetic field distribution
,
composited sructure target
J.C. Li
,
B.F. Wang
,
J.Z. Cui
,
null
,
null
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null
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null
,
null
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null
,
null
,
null
,
null
,
null
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null
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金属学报(英文版)
With the aid of ANSYS software, the effect of different mould external part materials on magnetic flux density in the aluminum melt and magnetic field interaction of four coils applied with same currents were investigated. Calculating results showed that magnetic flux density in the aluminum melt wa...
关键词:
low-frequency electromagnetic casting
,
null