Zhongfan LIU
,
Xuede YUAN
材料科学技术（英文）
Laser interference induced crystallization of amorphous silicon (a-Si) on the glass substrate was performed using a Q-switched Nd:YAG (yttrium aluminum garnet) laser. White light interferometer (WLI) and atomic force microscope (AFM) were used to characterize the morphology of the structured films, while X-ray diffraction (XRD), combined with the AFM, was used to analyse the crystalline structure of the film. The experimental results show that the laser energy density above a certain threshold, in the range of 400–500 mJ/cm2, triggers the patterned crystallizations which take the form similar to the laser intensity distribution. For the patterned crystallization under multipulse exposure, a definite polycrystalline structure with individual phases was observed by XRD. The difference in feature form, e.g., deepened craters or heightened lines, is related to the laser energy density relative to the threshold of evaporation of the material.
关键词:
pulsed laser
,
null
,
null
,
null
王哲哲
,
赵高扬
,
林林
,
冯卓宏
,
郑志强
功能材料
doi:10.3969/j.issn.1001-9731.2014.12.015
提出一种利用感光溶胶-凝胶法结合紫外光刻技术制备 Al2 O3微细图形的方法。以 Al (O-Sec-Bu)3为前驱物,β-二酮类配体 H(C10 H12 O2)为化学修饰剂,合成了稳定的、具有良好感光性的含 Al 金属螯合物,进而制备出相应的感光薄膜。研究了薄膜的紫外和红外光谱特性及其在紫外光辐照条件下的变化过程,结果表明金属螯合物薄膜在251,321和368 nm处各存在较强的紫外吸收峰。随着紫外光照时间的增加,吸收峰下降,Al2 O3/H 薄膜表现出明显的感光特性。结合紫外光刻技术,可制备出不同形状尺寸的Al2 O3微细图形,其最小线宽可达437 nm。
关键词:
Al2 O3 薄膜
,
感光溶胶-凝胶
,
化学修饰
,
激
