杨德钧
,
周虹辉
,
李辉勤
金属学报
研究了磁控溅射321不锈钢薄膜内Ti对膜结构由晶态向非晶态转化的影响用X射线衍射分析了膜的结构,结果表明,膜的结构随含Ti量不同而有变化在Ti含量(wt-％)为0—3,3—10,10-18,18-30时,膜的结构分别为α-Fe,α-Fe+x相,非晶+微晶,非晶态
关键词:
磁控溅射
,
stainless steel film
,
Ti
,
microstructure
YANG Dejun ZHOU Honghui LI Huiqin University of Science and Technology Beijing
,
Beijing
,
China professor
,
Department of Corrosion Engineering
,
University of Science and Technology Beijing
,
Beijing 100083
,
China
金属学报(英文版)
Effect of increasing content of Ti on the crystalline-to-amorphous transition in alloy film of stainless steel 321 plus Ti synthesized by high rate magnetron sputtering deposition is reported.X-ray diffraction analysis revealed that the microstructure of film was sequently changed from α-Fe,α-Fe-X-phase,microcrystalline+amorphous into amorphous with increasing content of Ti fiom 0—3,3—10,10—18 and 18—30 wt-% respectively.
关键词:
magnetron sputtering
,
null
,
null
,
null
